規(guī)格 |
中心高 |
測(cè)量直徑 |
精度 |
|
平行方向μm |
垂直方向μm |
|||
300 |
100 |
≤140 |
≤8 |
≤5 |
300 |
170 |
≤270 |
≤8 |
≤5 |
500 |
170 |
≤270 |
≤8 |
≤5 |
500 |
250 |
≤400 |
≤8 |
≤5 |
1000 |
170 |
≤270 |
≤10 |
≤8 |
1000 |
250 |
≤400 |
≤10 |
≤8 |
1500 |
170 |
≤270 |
≤16 |
≤15 |
1500 |
250 |
≤400 |
≤16 |
≤15 |